We are developing micromachined inertial measurement units including micromachined gyroscopes and accelerometers for high-performance applications. The designed gyroscopes and accelerometers are based on electrostatic excitation and capacitivie detection schemes. The details of the proposed gyroscopes can be found in the publications. Currently, our research has been focused on two different fabrication processes, namely electroforming and dissolved wafer processes. Following figures show the fabricated microstructures with these processes.

Fig. 1: Micromachined Ni electroplated gyroscope with a 5um-offset over the substrate.

Fig. 2: Close-up view of excitation mechanism of a suspended microgyroscope structure.

Fig. 3: 2um-spaced comb fingers using Ni electroplating process.

Fig. 4: Ni electroplated logo of our research group.

Fig. 5: SU-8 patterns. Feature size: 5-20um, height: 35-40 um.

APPLICATION AREAS

Intelligent cruise control (automotive)
Rollover detection (automotive)
Control of vehicle dynamics (automotive)
Crash sensors (automotive)
Flight control and test instruments (commercial)
Cockpit display stabilization in aircrafts (commercial)
Platform stabilization (industrial)

PUBLICATIONS

[1] S.E. Alper and T. Akin, "A Planar Gyroscope Using a Standard Surface Micromachining Process," The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), pp. 387-390, Copenhagen, Denmark, August 27-30, 2000.

[2] S.E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," The 11th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'01, Eurosensors XV), pp. 456-459, Munich, Germany, June 10-14, 2001.

[3] S.E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," Sensors and Actuators Journal A, Vol.96, pp.1-12, February 2002 (in print).

[4] S.E. Alper and T. Akin, "Optimum Designs for High-Performance Micromachined Gyroscopes," NATO RTO Sensors & Electronics Technology (RTO-SET) Panel: Symposium on Emerging Military Capabilities Enabled by Advances in Navigation Sensors, (accepted for publication), 14-16 October 2002, Turkey.

[5] S.E. Alper and T. Akin, "A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrates," submitted to The 16th European Conference on Solid-State Transducers, Eurosensors'02.

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