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Silicon Micromachined Capacitive Humidity Sensors for Industrial and Biomedical Applications


Miniaturised humidity sensors play an important role in a wide range of humidity measurement applications. Capacitive humidity sensors are the most preferred type of humidity sensors, satisfying the requirements of high sensitivity, short response time, small hysteresis, low cost, and low power consumption. Polyimide is the most frequently used humidity sensitive material because of its varying dielectric constant against relative humidity, which is almost linear.

APPLICATION AREAS


[Up] [Piezoresistive Pressure Sensor] [Gyroscope] [Bolometer] [Capacitive Pressure Sensor] [Humidity] [RF MEMS] [Thermopile]